Axcelis Technologies, Inc. is a leading developer and manufacturer of ion implantation and cleaning equipment used in the fabrication of semiconductor chips. The company specializes in high-current, medium-current and high-energy ion implantation systems, which are critical for introducing precisely controlled dopants into silicon wafers. Axcelis also offers plasma-based cleaning and dry strip tools that support advanced process nodes in logic, memory and power device manufacturing.
The company’s product portfolio encompasses single-wafer and multi-wafer cluster tools designed to deliver high throughput, accuracy and uniformity for semiconductor process steps. Axcelis supplements its core equipment offerings with application support, technical services, spare parts distribution and equipment upgrades, helping chipmakers optimize production yields and uptime across a variety of device architectures.
Axcelis traces its heritage to ion implantation units within Eaton Corporation and Emhart Technologies before becoming an independent, publicly traded company in 2000. Headquartered in Beverly, Massachusetts, the firm maintains research, development and manufacturing facilities in North America, while serving customers through sales and service operations across Europe, Japan, Korea, Taiwan, China and other Asia-Pacific regions.
Guided by a seasoned management team, Axcelis continues to invest in next-generation process technologies and collaborative development programs with global semiconductor manufacturers. Its focus on innovation, quality and customer support underpins its position as a critical supplier in the rapidly evolving semiconductor equipment industry.